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Amplified Airflow Sensors

HAF Series - Low Flow

Compensated. 10 SLPM to 300 SLPM. Digital output

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow.

Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.

Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

Data Sheet
Name
Description
File Size
Date
Size
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
application/pdf 1.7 MB
1/3/2022
1.7 MB
Honeywell ZephyrTM Digital Airflow Sensors HAF Series–High Accuracy: ±50 SCCM to ±750 SCCM
application/pdf 1.18 MB
6/15/2022
1.18 MB
Honeywell ZephyrTM Analog Airflow Sensors HAF Series-High Accuracy: ±50 SCCM to ±750 SCCM
application/pdf 1.23 MB
6/15/2022
1.23 MB
Manuals and Guides
Name
Description
File Size
Date
Size
Airflow, Force and Pressure Sensor Product Range Guide
application/pdf 2.78 MB
10/21/2021
2.78 MB
Installation Instructions
Name
Description
File Size
Date
Size
Honeywell Zephyrâ„¢ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
application/pdf 528.94 KB
10/22/2021
528.94 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
application/pdf 527.69 KB
10/22/2021
527.69 KB
CAD Model
Name
Description
File Size
Date
Size
Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
application/zip 1.77 MB
7/27/2022
1.77 MB
Brochure
Name
Description
File Size
Date
Size
Sensors and Switches for Medical Applications
application/pdf 10.15 MB
7/21/2022
10.15 MB
Embedded Products in Hospital Applications
application/pdf 4.7 MB
10/21/2021
4.7 MB
Controlling the Future with Technology
application/pdf 11.81 MB
8/17/2022
11.81 MB
Technical Note
Name
Description
File Size
Date
Size
Energy and Environmental Design Trends
application/pdf 828.15 KB
10/21/2021
828.15 KB
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
application/pdf 234.61 KB
10/22/2021
234.61 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
application/pdf 107.23 KB
10/22/2021
107.23 KB
Gas Media Compatibility & Correction Factors
application/pdf 146.35 KB
10/21/2021
146.35 KB
Industrial Product Line Card
application/pdf 2.24 MB
10/24/2022
2.24 MB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
application/pdf 89.36 KB
10/22/2021
89.36 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
application/pdf 199.5 KB
10/22/2021
199.5 KB
Airflow Sensor Glossary of Terms
application/pdf 163.38 KB
10/22/2021
163.38 KB
Pressure or Airflow Sensors?
application/pdf 560.47 KB
10/21/2021
560.47 KB
Catalog
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
application/pdf 83.89 KB
10/22/2021
83.89 KB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
application/postscript 322.83 KB
10/22/2021
322.83 KB
Application Note
Name
Description
File Size
Date
Size
Solutions for Ventilators
application/pdf 2.78 MB
11/25/2021
2.78 MB
Sensors in Sleep Apnea Machines
application/pdf 1.88 MB
10/21/2021
1.88 MB
Sensors in Anesthesia Machines
application/pdf 2.3 MB
10/21/2021
2.3 MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
application/pdf 284.01 KB
10/22/2021
284.01 KB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
application/pdf 491.14 KB
10/22/2021
491.14 KB
Sensors and Switches for HVAC Applications
application/pdf 4.51 MB
10/21/2021
4.51 MB
Solutions for Laboratory Automation
application/pdf 6.42 MB
11/25/2021
6.42 MB
Sensors and Switches: Solutions for Medical Applications
application/pdf 1.34 MB
7/21/2022
1.34 MB
Solutions For Healthier Air & HVAC Systems
application/pdf 3.88 MB
5/31/2022
3.88 MB
Product Photo
Name
Description
File Size
Date
Size
HAF Series - Low Flow Product Photo - grouped
application/zip 328.44 KB
10/21/2021
328.44 KB
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
83.89 KB
10/22/2021
83.89 KB
Solutions for Ventilators
2.78 MB
11/25/2021
2.78 MB
Energy and Environmental Design Trends
828.15 KB
10/21/2021
828.15 KB
Sensors in Sleep Apnea Machines
1.88 MB
10/21/2021
1.88 MB
Airflow, Force and Pressure Sensor Product Range Guide
2.78 MB
10/21/2021
2.78 MB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
322.83 KB
10/22/2021
322.83 KB
Sensors in Anesthesia Machines
2.3 MB
10/21/2021
2.3 MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
284.01 KB
10/22/2021
284.01 KB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
491.14 KB
10/22/2021
491.14 KB
Sensors and Switches for Medical Applications
10.15 MB
7/21/2022
10.15 MB
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
234.61 KB
10/22/2021
234.61 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
107.23 KB
10/22/2021
107.23 KB
Honeywell Zephyrâ„¢ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
528.94 KB
10/22/2021
528.94 KB
Gas Media Compatibility & Correction Factors
146.35 KB
10/21/2021
146.35 KB
HAF Series - Low Flow Product Photo - grouped
328.44 KB
10/21/2021
328.44 KB
Embedded Products in Hospital Applications
4.7 MB
10/21/2021
4.7 MB
Sensors and Switches for HVAC Applications
4.51 MB
10/21/2021
4.51 MB
Industrial Product Line Card
2.24 MB
10/24/2022
2.24 MB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
89.36 KB
10/22/2021
89.36 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
199.5 KB
10/22/2021
199.5 KB
Solutions for Laboratory Automation
6.42 MB
11/25/2021
6.42 MB
Airflow Sensor Glossary of Terms
163.38 KB
10/22/2021
163.38 KB
Pressure or Airflow Sensors?
560.47 KB
10/21/2021
560.47 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
527.69 KB
10/22/2021
527.69 KB
Sensors and Switches: Solutions for Medical Applications
1.34 MB
7/21/2022
1.34 MB
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
1.7 MB
1/3/2022
1.7 MB
Solutions For Healthier Air & HVAC Systems
3.88 MB
5/31/2022
3.88 MB
Honeywell ZephyrTM Digital Airflow Sensors HAF Series–High Accuracy: ±50 SCCM to ±750 SCCM
1.18 MB
6/15/2022
1.18 MB
Honeywell ZephyrTM Analog Airflow Sensors HAF Series-High Accuracy: ±50 SCCM to ±750 SCCM
1.23 MB
6/15/2022
1.23 MB
Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
1.77 MB
7/27/2022
1.77 MB
Controlling the Future with Technology
11.81 MB
8/17/2022
11.81 MB
Name
Description
File Size
Date
Size
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
1.7 MB
1/3/2022
Honeywell ZephyrTM Digital Airflow Sensors HAF Series–High Accuracy: ±50 SCCM to ±750 SCCM
1.18 MB
6/15/2022
Honeywell ZephyrTM Analog Airflow Sensors HAF Series-High Accuracy: ±50 SCCM to ±750 SCCM
1.23 MB
6/15/2022
Airflow, Force and Pressure Sensor Product Range Guide
2.78 MB
10/21/2021
Honeywell Zephyrâ„¢ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
528.94 KB
10/22/2021
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
527.69 KB
10/22/2021
Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
1.77 MB
7/27/2022
Sensors and Switches for Medical Applications
10.15 MB
7/21/2022
Embedded Products in Hospital Applications
4.7 MB
10/21/2021
Controlling the Future with Technology
11.81 MB
8/17/2022
Energy and Environmental Design Trends
828.15 KB
10/21/2021
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
234.61 KB
10/22/2021
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
107.23 KB
10/22/2021
Gas Media Compatibility & Correction Factors
146.35 KB
10/21/2021
Industrial Product Line Card
2.24 MB
10/24/2022
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
89.36 KB
10/22/2021
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
199.5 KB
10/22/2021
Airflow Sensor Glossary of Terms
163.38 KB
10/22/2021
Pressure or Airflow Sensors?
560.47 KB
10/21/2021
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
83.89 KB
10/22/2021
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
322.83 KB
10/22/2021
Solutions for Ventilators
2.78 MB
11/25/2021
Sensors in Sleep Apnea Machines
1.88 MB
10/21/2021
Sensors in Anesthesia Machines
2.3 MB
10/21/2021
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
284.01 KB
10/22/2021
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
491.14 KB
10/22/2021
Sensors and Switches for HVAC Applications
4.51 MB
10/21/2021
Solutions for Laboratory Automation
6.42 MB
11/25/2021
Sensors and Switches: Solutions for Medical Applications
1.34 MB
7/21/2022
Solutions For Healthier Air & HVAC Systems
3.88 MB
5/31/2022
HAF Series - Low Flow Product Photo - grouped
328.44 KB
10/21/2021
Image
SKU
Description
alt
HAFUHH0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0050L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 50 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0100L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 100 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0200L4AXT
ZEPHYR AIRFLOW SENSOR
alt
HAFUHM0010L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 10 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0200L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 200 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0300L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 300 SLPM flow range, digital I²C address: 0x49
alt
HAFUHT0015L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, G 3/8 female threaded fitting per ISO 1179, 0 SLPM to 15 SLPM flow range, digital I²C address: 0x49
alt
HAFUHT0020L4AXT
ZEPHYR AIRFLOW SENSOR
Image
SKU
Description
alt
HAFUHH0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0050L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 50 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0100L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 100 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0200L4AXT
ZEPHYR AIRFLOW SENSOR
alt
HAFUHM0010L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 10 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0200L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 200 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0300L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 300 SLPM flow range, digital I²C address: 0x49
alt
HAFUHT0015L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, G 3/8 female threaded fitting per ISO 1179, 0 SLPM to 15 SLPM flow range, digital I²C address: 0x49
alt
HAFUHT0020L4AXT
ZEPHYR AIRFLOW SENSOR