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Amplified Airflow Sensors

HAF Series - High FLow

Compensated. ±50 SCCM to ±750 SCCM - Analog or digital output. 10 SLPM to 300 SLPM - Digital output

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow.

Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases.

10 SLPM to 300 SLPM

Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

±50 SCCM to ±750 SCCM

Standard flow ranges are available at ±50, ±100, ±200, ±400 or ±750 SCCM. Custom flow ranges are also available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series is compensated over the temperature range of 0 °C to 50 °C [32 °F to 122 °F] and operates across a temperature range of -20 °C to 70 °C [-4 °F to 158 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.

Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

Data Sheet
Name
Description
File Size
Date
Size
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
application/pdf 1.7 MB
1/3/2022
1.7 MB
Manuals and Guides
Name
Description
File Size
Date
Size
Airflow sensors contain advanced microstructure technology to provide a sensitive and fast responseto flow, amount/direction of air or other gases. Potential applications include HVAC, gas metering, chromatography, vent hoods, and medical equipment.
application/pdf 2.76 MB
10/7/2021
2.76 MB
Installation Instructions
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
application/pdf 527.69 KB
10/7/2021
527.69 KB
CAD Model
Name
Description
File Size
Date
Size
HAF Series - High Flow CAD Models - grouped
application/zip 796.24 KB
10/7/2021
796.24 KB
Brochure
Name
Description
File Size
Date
Size
Embedded Products in Hospital Applications
application/pdf 4.7 MB
10/7/2021
4.7 MB
Sensors and Switches for Medical Applications
application/pdf 10.15 MB
10/7/2021
10.15 MB
Controlling the Future with Technology
application/pdf 11.81 MB
8/17/2022
11.81 MB
Technical Note
Name
Description
File Size
Date
Size
Gas Media Compatibility & Correction Factors
application/pdf 146.35 KB
10/7/2021
146.35 KB
Energy and Environmental Design Trends
application/pdf 833.47 KB
10/7/2021
833.47 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
application/pdf 199.5 KB
10/7/2021
199.5 KB
Airflow Sensor Glossary of Terms
application/pdf 163.38 KB
10/7/2021
163.38 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
application/pdf 89.36 KB
10/7/2021
89.36 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
application/pdf 107.23 KB
10/7/2021
107.23 KB
Pressure or Airflow Sensors?
application/pdf 564.63 KB
10/7/2021
564.63 KB
Industrial Product Line Card
application/pdf 2.24 MB
10/24/2022
2.24 MB
Catalog
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
application/pdf 83.89 KB
10/7/2021
83.89 KB
Application Note
Name
Description
File Size
Date
Size
Sensors and Switches: Solutions for Medical Applications
application/pdf 1.34 MB
11/23/2021
1.34 MB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
application/pdf 491.14 KB
10/7/2021
491.14 KB
Sensors and Switches for HVAC Applications
application/pdf 4.51 MB
10/7/2021
4.51 MB
Sensors in Sleep Apnea Machines
application/pdf 1.88 MB
10/7/2021
1.88 MB
Solutions For Healthier Air & HVAC Systems
application/pdf 3.88 MB
5/31/2022
3.88 MB
Solutions for Ventilators
application/pdf 2.78 MB
11/25/2021
2.78 MB
Sensors in Anesthesia Machines
application/pdf 2.3 MB
10/7/2021
2.3 MB
Product Photo
Name
Description
File Size
Date
Size
HAF Series - High Flow Product Photo - grouped
application/zip 600.51 KB
10/7/2021
600.51 KB
Name
Description
File Size
Date
Size
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
1.7 MB
1/3/2022
1.7 MB
HAF Series - High Flow Product Photo - grouped
600.51 KB
10/7/2021
600.51 KB
Sensors and Switches: Solutions for Medical Applications
1.34 MB
11/23/2021
1.34 MB
Gas Media Compatibility & Correction Factors
146.35 KB
10/7/2021
146.35 KB
Energy and Environmental Design Trends
833.47 KB
10/7/2021
833.47 KB
Embedded Products in Hospital Applications
4.7 MB
10/7/2021
4.7 MB
Airflow sensors contain advanced microstructure technology to provide a sensitive and fast responseto flow, amount/direction of air or other gases. Potential applications include HVAC, gas metering, chromatography, vent hoods, and medical equipment.
2.76 MB
10/7/2021
2.76 MB
Sensors and Switches for Medical Applications
10.15 MB
10/7/2021
10.15 MB
HAF Series - High Flow CAD Models - grouped
796.24 KB
10/7/2021
796.24 KB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
491.14 KB
10/7/2021
491.14 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
199.5 KB
10/7/2021
199.5 KB
Sensors and Switches for HVAC Applications
4.51 MB
10/7/2021
4.51 MB
Airflow Sensor Glossary of Terms
163.38 KB
10/7/2021
163.38 KB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
83.89 KB
10/7/2021
83.89 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
89.36 KB
10/7/2021
89.36 KB
Sensors in Sleep Apnea Machines
1.88 MB
10/7/2021
1.88 MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
527.69 KB
10/7/2021
527.69 KB
Solutions For Healthier Air & HVAC Systems
3.88 MB
5/31/2022
3.88 MB
Solutions for Ventilators
2.78 MB
11/25/2021
2.78 MB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
107.23 KB
10/7/2021
107.23 KB
Pressure or Airflow Sensors?
564.63 KB
10/7/2021
564.63 KB
Sensors in Anesthesia Machines
2.3 MB
10/7/2021
2.3 MB
Controlling the Future with Technology
11.81 MB
8/17/2022
11.81 MB
Industrial Product Line Card
2.24 MB
10/24/2022
2.24 MB
Name
Description
File Size
Date
Size
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
1.7 MB
1/3/2022
Airflow sensors contain advanced microstructure technology to provide a sensitive and fast responseto flow, amount/direction of air or other gases. Potential applications include HVAC, gas metering, chromatography, vent hoods, and medical equipment.
2.76 MB
10/7/2021
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
527.69 KB
10/7/2021
HAF Series - High Flow CAD Models - grouped
796.24 KB
10/7/2021
Embedded Products in Hospital Applications
4.7 MB
10/7/2021
Sensors and Switches for Medical Applications
10.15 MB
10/7/2021
Controlling the Future with Technology
11.81 MB
8/17/2022
Gas Media Compatibility & Correction Factors
146.35 KB
10/7/2021
Energy and Environmental Design Trends
833.47 KB
10/7/2021
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
199.5 KB
10/7/2021
Airflow Sensor Glossary of Terms
163.38 KB
10/7/2021
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
89.36 KB
10/7/2021
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
107.23 KB
10/7/2021
Pressure or Airflow Sensors?
564.63 KB
10/7/2021
Industrial Product Line Card
2.24 MB
10/24/2022
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
83.89 KB
10/7/2021
Sensors and Switches: Solutions for Medical Applications
1.34 MB
11/23/2021
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, Ł50 SCCM to Ł750 SCCM
491.14 KB
10/7/2021
Sensors and Switches for HVAC Applications
4.51 MB
10/7/2021
Sensors in Sleep Apnea Machines
1.88 MB
10/7/2021
Solutions For Healthier Air & HVAC Systems
3.88 MB
5/31/2022
Solutions for Ventilators
2.78 MB
11/25/2021
Sensors in Anesthesia Machines
2.3 MB
10/7/2021
HAF Series - High Flow Product Photo - grouped
600.51 KB
10/7/2021
Image
SKU
Description
alt
HAFBLF0050C4AX5
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 50 SCCM flow range, digital I²C address: 0x49, 5.0 Vdc supply voltage
alt
HAFBLF0050CAAX5
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 50 SCCM flow range, 5.0 Vdc supply voltage
alt
HAFBLF0200C2AX3
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, digital I²C address: 0x29, 5.0 Vdc supply voltage
alt
HAFBLF0200C2AX5
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, digital I²C address: 0x29, 5.0 Vdc supply voltage
alt
HAFBLF0200C4AX3
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, digital I²C address: 0x49, 5.0 Vdc supply voltage
alt
HAFBLF0200C4AX5
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, digital I²C address: 0x49, 5.0 Vdc supply voltage
alt
HAFBLF0200CAAX3
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, 3.3 Vdc supply voltage
alt
HAFBLF0200CAAX5
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, 5.0 Vdc supply voltage
alt
HAFBLF0750C4AX5
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 750 SCCM flow range, digital I²C address: 0x49, 5.0 Vdc supply voltage
alt
HAFBLF0750CAAX5
AIRFLOW SENSOR
Image
SKU
Description
alt
HAFBLF0050C4AX5
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 50 SCCM flow range, digital I²C address: 0x49, 5.0 Vdc supply voltage
alt
HAFBLF0050CAAX5
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 50 SCCM flow range, 5.0 Vdc supply voltage
alt
HAFBLF0200C2AX3
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, digital I²C address: 0x29, 5.0 Vdc supply voltage
alt
HAFBLF0200C2AX5
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, digital I²C address: 0x29, 5.0 Vdc supply voltage
alt
HAFBLF0200C4AX3
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, digital I²C address: 0x49, 5.0 Vdc supply voltage
alt
HAFBLF0200C4AX5
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, digital I²C address: 0x49, 5.0 Vdc supply voltage
alt
HAFBLF0200CAAX3
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, 3.3 Vdc supply voltage
alt
HAFBLF0200CAAX5
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 200 SCCM flow range, 5.0 Vdc supply voltage
alt
HAFBLF0750C4AX5
Honeywell Zephyr™ digital airflow sensors: HAF Series-high accuracy, bidirectional flow, long port, fastener mount, 0 SCCM to 750 SCCM flow range, digital I²C address: 0x49, 5.0 Vdc supply voltage
alt
HAFBLF0750CAAX5
AIRFLOW SENSOR