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Amplified Airflow Sensors

AWM40000 Series

Compensated or uncompensated. ±25.0 SCCM, 1.0 SLPM, 6.0 SLPM. Analog output

Operation

The microbridge mass airflow sensor operates on the theory of heat transfer. Mass airflow is directed across the surface of the sensing elements. Output voltage varies in proportion to the mass air or other gas flow through the inlet and outlet ports of the package. The specially designed housing precisely directs and controls the airflow across the microstructure sensing element. Mechanical design of the package allows it to be easily mounted to printed circuit boards.

The microbridge mass airflow sensor has a unique silicon chip based on advanced microstructure technology. It consists of a thin-film, thermally isolated bridge structure containing heater and temperature sensing elements. The bridge structure provides a sensitive and fast response to the flow of air or other gas over the chip. Dual sensing elements positioned on both sides of a central heating element indicate flow direction as well as flow rate. Laser trimmed thick film and thin film resistors provide consistent interchangeability from one device to the next.

The microbridge mass airflow sensor uses temperature sensitive resistors deposited within a thin film of silicon nitride. They are suspended in the form of two bridges over an etched cavity in the silicon. The chip is located in a precisely dimensioned airflow channel to provide a repeatable flow response. Highly effective thermal isolation for the heater and sensing resistors is attained by etching the cavity space beneath the flow sensor bridges. The small size and thermal isolation of the microbridge mass airflow sensor are responsible for the extremely fast response and high sensitivity to flows.

Dual Wheatstone bridges control airflow measurement – one provides closed loop heater control, the other contains the dual sensing elements. The heater circuit minimizes shift due to ambient temperature changes by providing an output proportional to mass flow. The circuit keeps the heater temperature at a constant differential (160 °C) above ambient air temperature which is sensed by a heat-sunk resistor on the chip. The ratiometric voltage output of the device corresponds to the differential voltage across the Wheatstone bridge circuit.

NOTICE

The effects of dust contamination, which may result form some applications, can be minimized. By design, dust particles that may be present in the air stream will flow past the chip parallel to the chip surface. In addition, the microstructure chip produces a thermophoretic effect, which repels micrometer sized dust particles away from the bridge structure.

A simple filter will prevent dust adherence to chip edges and channel surfaces. Adequate filtering in most applications can be achieved with a disposable five-micron filter used in series on the upstream side of the airflow device.

CAUTION: PRODUCT DAMAGE

AWM Series Microbridge Mass Airflow Sensors are not designed to sense liquid flow and will be damaged by liquid flow through the sensor.

Failure to comply with these instructions could result in product damage.

Data Sheet
Name
Description
File Size
Date
Size
AWM40000 Series Airflow Sensors, Unamplified and Amplified
application/pdf 770.8 KB
10/14/2022
770.8 KB
Manuals and Guides
Name
Description
File Size
Date
Size
Airflow sensors contain advanced microstructure technology to provide a sensitive and fast responseto flow, amount/direction of air or other gases. Potential applications include HVAC, gas metering, chromatography, vent hoods, and medical equipment.
application/pdf 4.14 MB
7/22/2021
4.14 MB
AWM40000 Series Microbridge Mass Gas-flow Sensors
application/pdf 194.4 KB
7/22/2021
194.4 KB
CAD Model
Name
Description
File Size
Date
Size
AWM40000 Series CAD Models - grouped
application/zip 182.64 KB
7/22/2021
182.64 KB
AWM40000 Series AWM42150VH CAD Model.zip
application/zip 89.71 KB
7/22/2021
89.71 KB
AWM40000 Series AWM43300V CAD Model.zip
application/zip 92.88 KB
7/22/2021
92.88 KB
Brochure
Name
Description
File Size
Date
Size
Sensors and Switches for Medical Applications
application/pdf 10.15 MB
7/22/2021
10.15 MB
Technical Note
Name
Description
File Size
Date
Size
Airflow Sensor Glossary of Terms
application/pdf 156.26 KB
7/22/2021
156.26 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
application/pdf 100.21 KB
7/22/2021
100.21 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
application/pdf 192.45 KB
7/22/2021
192.45 KB
Gas Media Compatibility & Correction Factors
application/pdf 97.66 KB
7/22/2021
97.66 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
application/pdf 86.49 KB
7/22/2021
86.49 KB
Pressure or Airflow Sensors?
application/pdf 560.47 KB
7/22/2021
560.47 KB
Energy and Environmental Design Trends
application/pdf 828.15 KB
7/30/2021
828.15 KB
Catalog
Name
Description
File Size
Date
Size
AWM Series Airflow Sensors Introduction
application/pdf 188.31 KB
7/22/2021
188.31 KB
Application Note
Name
Description
File Size
Date
Size
Solutions for Ventilators
application/pdf 2.78 MB
11/25/2021
2.78 MB
Sensors and Switches: Solutions for Medical Applications
application/pdf 1.34 MB
11/23/2021
1.34 MB
Name
Description
File Size
Date
Size
Airflow Sensor Glossary of Terms
156.26 KB
7/22/2021
156.26 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
7/22/2021
100.21 KB
AWM40000 Series CAD Models - grouped
182.64 KB
7/22/2021
182.64 KB
Sensors and Switches for Medical Applications
10.15 MB
7/22/2021
10.15 MB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
7/22/2021
192.45 KB
Airflow sensors contain advanced microstructure technology to provide a sensitive and fast responseto flow, amount/direction of air or other gases. Potential applications include HVAC, gas metering, chromatography, vent hoods, and medical equipment.
4.14 MB
7/22/2021
4.14 MB
AWM40000 Series Microbridge Mass Gas-flow Sensors
194.4 KB
7/22/2021
194.4 KB
Solutions for Ventilators
2.78 MB
11/25/2021
2.78 MB
AWM40000 Series Airflow Sensors, Unamplified and Amplified
770.8 KB
10/14/2022
770.8 KB
Gas Media Compatibility & Correction Factors
97.66 KB
7/22/2021
97.66 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
7/22/2021
86.49 KB
Pressure or Airflow Sensors?
560.47 KB
7/22/2021
560.47 KB
Energy and Environmental Design Trends
828.15 KB
7/30/2021
828.15 KB
AWM Series Airflow Sensors Introduction
188.31 KB
7/22/2021
188.31 KB
AWM40000 Series AWM42150VH CAD Model.zip
89.71 KB
7/22/2021
89.71 KB
AWM40000 Series AWM43300V CAD Model.zip
92.88 KB
7/22/2021
92.88 KB
Sensors and Switches: Solutions for Medical Applications
1.34 MB
11/23/2021
1.34 MB
Name
Description
File Size
Date
Size
AWM40000 Series Airflow Sensors, Unamplified and Amplified
770.8 KB
10/14/2022
Airflow sensors contain advanced microstructure technology to provide a sensitive and fast responseto flow, amount/direction of air or other gases. Potential applications include HVAC, gas metering, chromatography, vent hoods, and medical equipment.
4.14 MB
7/22/2021
AWM40000 Series Microbridge Mass Gas-flow Sensors
194.4 KB
7/22/2021
AWM40000 Series CAD Models - grouped
182.64 KB
7/22/2021
AWM40000 Series AWM42150VH CAD Model.zip
89.71 KB
7/22/2021
AWM40000 Series AWM43300V CAD Model.zip
92.88 KB
7/22/2021
Sensors and Switches for Medical Applications
10.15 MB
7/22/2021
Airflow Sensor Glossary of Terms
156.26 KB
7/22/2021
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
7/22/2021
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
7/22/2021
Gas Media Compatibility & Correction Factors
97.66 KB
7/22/2021
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
7/22/2021
Pressure or Airflow Sensors?
560.47 KB
7/22/2021
Energy and Environmental Design Trends
828.15 KB
7/30/2021
AWM Series Airflow Sensors Introduction
188.31 KB
7/22/2021
Solutions for Ventilators
2.78 MB
11/25/2021
Sensors and Switches: Solutions for Medical Applications
1.34 MB
11/23/2021
Image
SKU
Description
alt
AWM42150VH
AWM40000 Series airflow sensor, unamplified (mV), flow/pressure range: ±25.0 sccm; port style: manifold
alt
AWM42300V
AWM40000 Series airflow sensor, unamplified (mV), flow/pressure range: ±1000 sccm (1.0 SLPM); port style: manifold
alt
AWM43300V
AWM40000 Series airflow sensor, amplified, flow/pressure range: +1000 sccm (1.0 SLPM); port style: manifold
alt
AWM43600V
AWM40000 Series airflow sensor, amplified, flow/pressure range: +6.0 SLPM; port style: manifold
Image
SKU
Description
alt
AWM42150VH
AWM40000 Series airflow sensor, unamplified (mV), flow/pressure range: ±25.0 sccm; port style: manifold
alt
AWM42300V
AWM40000 Series airflow sensor, unamplified (mV), flow/pressure range: ±1000 sccm (1.0 SLPM); port style: manifold
alt
AWM43300V
AWM40000 Series airflow sensor, amplified, flow/pressure range: +1000 sccm (1.0 SLPM); port style: manifold
alt
AWM43600V
AWM40000 Series airflow sensor, amplified, flow/pressure range: +6.0 SLPM; port style: manifold