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Amplified Airflow Sensors

HAF Series - Low Flow

Compensated. 10 SLPM to 300 SLPM. Digital output

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow.

Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.

Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

Data Sheet
Name
Description
File Size
Date
Size
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
application/pdf 1.7 MB
1/3/2022
1.7 MB
Honeywell ZephyrTM Digital Airflow Sensors HAF Series–High Accuracy: ±50 SCCM to ±750 SCCM
application/pdf 1.18 MB
6/15/2022
1.18 MB
Honeywell ZephyrTM Analog Airflow Sensors HAF Series-High Accuracy: ±50 SCCM to ±750 SCCM
application/pdf 1.23 MB
6/15/2022
1.23 MB
Manuals and Guides
Name
Description
File Size
Date
Size
Airflow sensors contain advanced microstructure technology to provide a sensitive and fast responseto flow, amount/direction of air or other gases. Potential applications include HVAC, gas metering, chromatography, vent hoods, and medical equipment.
application/pdf 4.14 MB
7/22/2021
4.14 MB
Installation Instructions
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM Installation Instructions
application/pdf 524.05 KB
7/22/2021
524.05 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
application/pdf 474.08 KB
7/22/2021
474.08 KB
Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
application/pdf 524.05 KB
7/22/2022
524.05 KB
CAD Model
Name
Description
File Size
Date
Size
Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
application/zip 1.77 MB
7/27/2022
1.77 MB
Brochure
Name
Description
File Size
Date
Size
Sensors and Switches for Medical Applications
application/pdf 10.15 MB
7/22/2021
10.15 MB
Embedded Products in Hospital Applications
application/pdf 4.7 MB
7/22/2021
4.7 MB
Controlling the Future with Technology
application/pdf 11.81 MB
8/17/2022
11.81 MB
Technical Note
Name
Description
File Size
Date
Size
Airflow Sensor Glossary of Terms
application/pdf 156.26 KB
7/22/2021
156.26 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
application/pdf 192.45 KB
7/22/2021
192.45 KB
Industrial Product Line Card
application/pdf 2.24 MB
10/24/2022
2.24 MB
Gas Media Compatibility & Correction Factors
application/pdf 97.66 KB
7/22/2021
97.66 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
application/pdf 86.49 KB
7/22/2021
86.49 KB
Pressure or Airflow Sensors?
application/pdf 560.47 KB
7/22/2021
560.47 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
application/pdf 100.21 KB
7/22/2021
100.21 KB
Energy and Environmental Design Trends
application/pdf 828.15 KB
7/30/2021
828.15 KB
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
application/pdf 237.91 KB
7/22/2021
237.91 KB
Catalog
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
application/postscript 319.61 KB
7/22/2021
319.61 KB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM
application/pdf 82.4 KB
7/22/2021
82.4 KB
Application Note
Name
Description
File Size
Date
Size
Sensors and Switches: Solutions for Medical Applications
application/pdf 1.34 MB
11/23/2021
1.34 MB
Solutions for Ventilators
application/pdf 2.78 MB
11/25/2021
2.78 MB
Sensors in Sleep Apnea Machines
application/pdf 1.88 MB
7/22/2021
1.88 MB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
application/pdf 488.55 KB
7/22/2021
488.55 KB
Sensors in Anesthesia Machines
application/pdf 2.3 MB
7/22/2021
2.3 MB
Sensors and Switches for HVAC Applications
application/pdf 4.51 MB
7/22/2021
4.51 MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
application/pdf 282.8 KB
7/22/2021
282.8 KB
Solutions for Laboratory Automation
application/pdf 6.42 MB
11/25/2021
6.42 MB
Solutions For Healthier Air & HVAC Systems
application/pdf 3.88 MB
5/31/2022
3.88 MB
Product Photo
Name
Description
File Size
Date
Size
HT port style lowres photo
image/jpeg 15.73 KB
7/22/2021
15.73 KB
HM port style highres photo
image/jpeg 99.62 KB
7/22/2021
99.62 KB
HH port style lowres photo
image/jpeg 21.16 KB
7/22/2021
21.16 KB
HAF Series - Low Flow Product Photo - grouped
application/zip 328.44 KB
7/22/2021
328.44 KB
HM port style lowres photo
image/jpeg 18.66 KB
7/22/2021
18.66 KB
HH port style highres photo
image/jpeg 110.38 KB
7/22/2021
110.38 KB
HT port style highres photo
image/jpeg 67.61 KB
7/22/2021
67.61 KB
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM Installation Instructions
524.05 KB
7/22/2021
524.05 KB
Airflow Sensor Glossary of Terms
156.26 KB
7/22/2021
156.26 KB
HT port style lowres photo
15.73 KB
7/22/2021
15.73 KB
Sensors and Switches: Solutions for Medical Applications
1.34 MB
11/23/2021
1.34 MB
Solutions for Ventilators
2.78 MB
11/25/2021
2.78 MB
Sensors in Sleep Apnea Machines
1.88 MB
7/22/2021
1.88 MB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
319.61 KB
7/22/2021
319.61 KB
HM port style highres photo
99.62 KB
7/22/2021
99.62 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
7/22/2021
192.45 KB
Industrial Product Line Card
2.24 MB
10/24/2022
2.24 MB
HH port style lowres photo
21.16 KB
7/22/2021
21.16 KB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
488.55 KB
7/22/2021
488.55 KB
Gas Media Compatibility & Correction Factors
97.66 KB
7/22/2021
97.66 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
7/22/2021
86.49 KB
Pressure or Airflow Sensors?
560.47 KB
7/22/2021
560.47 KB
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
1.7 MB
1/3/2022
1.7 MB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
7/22/2021
100.21 KB
Sensors and Switches for Medical Applications
10.15 MB
7/22/2021
10.15 MB
Airflow sensors contain advanced microstructure technology to provide a sensitive and fast responseto flow, amount/direction of air or other gases. Potential applications include HVAC, gas metering, chromatography, vent hoods, and medical equipment.
4.14 MB
7/22/2021
4.14 MB
Sensors in Anesthesia Machines
2.3 MB
7/22/2021
2.3 MB
Sensors and Switches for HVAC Applications
4.51 MB
7/22/2021
4.51 MB
Energy and Environmental Design Trends
828.15 KB
7/30/2021
828.15 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
282.8 KB
7/22/2021
282.8 KB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM
82.4 KB
7/22/2021
82.4 KB
Solutions for Laboratory Automation
6.42 MB
11/25/2021
6.42 MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
474.08 KB
7/22/2021
474.08 KB
HAF Series - Low Flow Product Photo - grouped
328.44 KB
7/22/2021
328.44 KB
HM port style lowres photo
18.66 KB
7/22/2021
18.66 KB
Embedded Products in Hospital Applications
4.7 MB
7/22/2021
4.7 MB
HH port style highres photo
110.38 KB
7/22/2021
110.38 KB
HT port style highres photo
67.61 KB
7/22/2021
67.61 KB
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
237.91 KB
7/22/2021
237.91 KB
Solutions For Healthier Air & HVAC Systems
3.88 MB
5/31/2022
3.88 MB
Honeywell ZephyrTM Digital Airflow Sensors HAF Series–High Accuracy: ±50 SCCM to ±750 SCCM
1.18 MB
6/15/2022
1.18 MB
Honeywell ZephyrTM Analog Airflow Sensors HAF Series-High Accuracy: ±50 SCCM to ±750 SCCM
1.23 MB
6/15/2022
1.23 MB
Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
524.05 KB
7/22/2022
524.05 KB
Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
1.77 MB
7/27/2022
1.77 MB
Controlling the Future with Technology
11.81 MB
8/17/2022
11.81 MB
Name
Description
File Size
Date
Size
Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
1.7 MB
1/3/2022
Honeywell ZephyrTM Digital Airflow Sensors HAF Series–High Accuracy: ±50 SCCM to ±750 SCCM
1.18 MB
6/15/2022
Honeywell ZephyrTM Analog Airflow Sensors HAF Series-High Accuracy: ±50 SCCM to ±750 SCCM
1.23 MB
6/15/2022
Airflow sensors contain advanced microstructure technology to provide a sensitive and fast responseto flow, amount/direction of air or other gases. Potential applications include HVAC, gas metering, chromatography, vent hoods, and medical equipment.
4.14 MB
7/22/2021
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM Installation Instructions
524.05 KB
7/22/2021
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
474.08 KB
7/22/2021
Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
524.05 KB
7/22/2022
Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
1.77 MB
7/27/2022
Sensors and Switches for Medical Applications
10.15 MB
7/22/2021
Embedded Products in Hospital Applications
4.7 MB
7/22/2021
Controlling the Future with Technology
11.81 MB
8/17/2022
Airflow Sensor Glossary of Terms
156.26 KB
7/22/2021
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
7/22/2021
Industrial Product Line Card
2.24 MB
10/24/2022
Gas Media Compatibility & Correction Factors
97.66 KB
7/22/2021
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
7/22/2021
Pressure or Airflow Sensors?
560.47 KB
7/22/2021
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
7/22/2021
Energy and Environmental Design Trends
828.15 KB
7/30/2021
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
237.91 KB
7/22/2021
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
319.61 KB
7/22/2021
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM
82.4 KB
7/22/2021
Sensors and Switches: Solutions for Medical Applications
1.34 MB
11/23/2021
Solutions for Ventilators
2.78 MB
11/25/2021
Sensors in Sleep Apnea Machines
1.88 MB
7/22/2021
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
488.55 KB
7/22/2021
Sensors in Anesthesia Machines
2.3 MB
7/22/2021
Sensors and Switches for HVAC Applications
4.51 MB
7/22/2021
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
282.8 KB
7/22/2021
Solutions for Laboratory Automation
6.42 MB
11/25/2021
Solutions For Healthier Air & HVAC Systems
3.88 MB
5/31/2022
HT port style lowres photo
15.73 KB
7/22/2021
HM port style highres photo
99.62 KB
7/22/2021
HH port style lowres photo
21.16 KB
7/22/2021
HAF Series - Low Flow Product Photo - grouped
328.44 KB
7/22/2021
HM port style lowres photo
18.66 KB
7/22/2021
HH port style highres photo
110.38 KB
7/22/2021
HT port style highres photo
67.61 KB
7/22/2021
Image
SKU
Description
alt
HAFUHH0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0050L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 50 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0100L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 100 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0200L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 200 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0010L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 10 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0200L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 200 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0300L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 300 SLPM flow range, digital I²C address: 0x49
alt
HAFUHT0015L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, G 3/8 female threaded fitting per ISO 1179, 0 SLPM to 15 SLPM flow range, digital I²C address: 0x49
alt
HAFUHT0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, G 3/8 female threaded fitting per ISO 1179, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49
Image
SKU
Description
alt
HAFUHH0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0050L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 50 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0100L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 100 SLPM flow range, digital I²C address: 0x49
alt
HAFUHH0200L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, 22 mm OD tapered male fitting per ISO 5356, 0 SLPM to 200 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0010L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 10 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0200L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 200 SLPM flow range, digital I²C address: 0x49
alt
HAFUHM0300L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, manifold mount, 0 SLPM to 300 SLPM flow range, digital I²C address: 0x49
alt
HAFUHT0015L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, G 3/8 female threaded fitting per ISO 1179, 0 SLPM to 15 SLPM flow range, digital I²C address: 0x49
alt
HAFUHT0020L4AXT
Honeywell Zephyr™ analog airflow sensors: HAF Series-high accuracy, unidirectional flow, G 3/8 female threaded fitting per ISO 1179, 0 SLPM to 20 SLPM flow range, digital I²C address: 0x49