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Amplified Airflow Sensors

HAF Series - Low Flow

Compensated. 10 SLPM to 300 SLPM. Digital output

HAF Series - Low Flow

Distributor Inventory

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow.

Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.

Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

Others

  • Response Time
    • 1 ms typ.
  • Storage Temperature
    • -40°C to 100°C [-40°F to 212°F]
  • Operating Temperature
    • -20°C to 70°C [-4°F to 158°F]
  • Flow/Pressure Range
    • 0 SLPM to 50 SLPM
    • 0 SLPM to 200 SLPM
    • 0 SLPM to 20 SLPM
    • 0 SLPM to 10 SLPM
    • 0 SLPM to 300 SLPM
    • 0 SLPM to 15 SLPM
    • 0 SLPM to 100 SLPM
  • Compensated Temperature
    • 0°C to 50°C [32°F to 122°F]
  • Port Style
    • Manifold mount
    • G 3/8 female threaded fitting per ISO 1179
    • 22 mm OD tapered male fitting per ISO 5356
  • UNSPSC Commodity
    • 41111931 Flow Sensors
  • Media Compatibility
    • Dry gas only
  • Signal Conditioning
    • Amplified
  • Supply Voltage
    • 3 Vdc to 10 Vdc
  • Series Name
    • HAF
  • Power Consumption
    • 60 mW max. to 200 mW max.
  • UNSPSC Code
    • 41111931

Others

  • Response Time
    • 1 ms typ.
  • Storage Temperature
    • -40°C to 100°C [-40°F to 212°F]
  • Operating Temperature
    • -20°C to 70°C [-4°F to 158°F]
  • Flow/Pressure Range
    • 0 SLPM to 50 SLPM
    • 0 SLPM to 200 SLPM
    • 0 SLPM to 20 SLPM
    • 0 SLPM to 10 SLPM
    • 0 SLPM to 300 SLPM
    • 0 SLPM to 15 SLPM
    • 0 SLPM to 100 SLPM
  • Compensated Temperature
    • 0°C to 50°C [32°F to 122°F]
  • Port Style
    • Manifold mount
    • G 3/8 female threaded fitting per ISO 1179
    • 22 mm OD tapered male fitting per ISO 5356
  • UNSPSC Commodity
    • 41111931 Flow Sensors
  • Media Compatibility
    • Dry gas only
  • Signal Conditioning
    • Amplified
  • Supply Voltage
    • 3 Vdc to 10 Vdc
  • Series Name
    • HAF
  • Power Consumption
    • 60 mW max. to 200 mW max.
  • UNSPSC Code
    • 41111931
  • Response Time : 1 ms typ.
  • Storage Temperature : -40°C to 100°C [-40°F to 212°F]
  • Operating Temperature : -20°C to 70°C [-4°F to 158°F]
  • Flow/Pressure Range : 0 SLPM to 50 SLPM|0 SLPM to 200 SLPM|0 SLPM to 20 SLPM|0 SLPM to 10 SLPM|0 SLPM to 300 SLPM|0 SLPM to 15 SLPM|0 SLPM to 100 SLPM
  • Compensated Temperature : 0°C to 50°C [32°F to 122°F]
  • Port Style : Manifold mount|G 3/8 female threaded fitting per ISO 1179|22 mm OD tapered male fitting per ISO 5356
  • UNSPSC Commodity : 41111931 Flow Sensors
  • Media Compatibility : Dry gas only
  • Signal Conditioning : Amplified
  • Supply Voltage : 3 Vdc to 10 Vdc
  • Series Name : HAF
  • Power Consumption : 60 mW max. to 200 mW max.
  • UNSPSC Code : 41111931
Technical Note
Name
Description
File Size
Date
Size
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
9/10/2020
PDF 100.21 KB
Gas Media Compatibility & Correction Factors
97.66 KB
9/10/2020
PDF 97.66 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
9/10/2020
PDF 86.49 KB
Airflow Sensor Glossary of Terms
156.26 KB
9/10/2020
PDF 156.26 KB
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
237.91 KB
9/10/2020
PDF 237.91 KB
HM port style highres photo
99.62 KB
9/10/2020
99.62 KB
HT port style highres photo
67.61 KB
9/10/2020
67.61 KB
HH port style highres photo
110.38 KB
9/10/2020
110.38 KB
Energy and Environmental Design Trends
823.31 KB
1/11/2021
PDF 823.31 KB
Pressure or Airflow Sensors?
553.46 KB
1/11/2021
PDF 553.46 KB
Zephyr™ Digital HAF Series High Accuracy G 3/8 Threaded Female Fitting CAD Model.zip
357.53 KB
10/19/2020
357.53 KB
Zephyr™ Digital HAF Series High Accuracy Manifold Mount CAD Model.zip
288.48 KB
10/19/2020
288.48 KB
Zephyr™ Digital HAF Series High Accuracy 22 mm OD Tapered Male Fitting CAD Model.zip
150.07 KB
10/19/2020
150.07 KB
Brochure
Name
Description
File Size
Date
Size
Embedded Products in Hospital Applications
4.7 MB
1/11/2021
PDF 4.7 MB
Airflow, Force, and Pressure Sensors Range Guide
2.03 MB
1/11/2021
PDF 2.03 MB
Sensors and Switches for Medical Applications
10.08 MB
10/14/2020
PDF 10.08 MB
Application Note
Name
Description
File Size
Date
Size
Sensors in Sleep Apnea Machines
1.88 MB
1/11/2021
PDF 1.88 MB
Sensors and Switches: Solutions for Medical Applications
1.35 MB
1/11/2021
PDF 1.35 MB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
488.55 KB
9/10/2020
PDF 488.55 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
282.8 KB
9/10/2020
PDF 282.8 KB
Solutions for Ventilators
2.79 MB
1/11/2021
PDF 2.79 MB
Sensors and Switches for HVAC Applications
4.51 MB
1/11/2021
PDF 4.51 MB
Manuals and Guides
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM Installation Instructions
524.05 KB
9/10/2020
PDF 524.05 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
474.08 KB
9/10/2020
PDF 474.08 KB
Catalog
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, �50 SCCM to �750 SCCM
82.4 KB
9/10/2020
PDF 82.4 KB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
319.61 KB
9/10/2020
319.61 KB
Data Sheet
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
714.43 KB
9/10/2020
PDF 714.43 KB
Others
Name
Description
File Size
Date
Size
HM port style lowres photo
18.66 KB
9/10/2020
18.66 KB
HT port style lowres photo
15.73 KB
9/10/2020
15.73 KB
Name
Description
File Size
Date
Size
HM port style lowres photo
18.66 KB
9/10/2020
18.66 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
9/10/2020
PDF 100.21 KB
Gas Media Compatibility & Correction Factors
97.66 KB
9/10/2020
PDF 97.66 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
9/10/2020
PDF 86.49 KB
Embedded Products in Hospital Applications
4.7 MB
1/11/2021
PDF 4.7 MB
HT port style lowres photo
15.73 KB
9/10/2020
15.73 KB
Airflow Sensor Glossary of Terms
156.26 KB
9/10/2020
PDF 156.26 KB
Sensors in Sleep Apnea Machines
1.88 MB
1/11/2021
PDF 1.88 MB
Sensors and Switches: Solutions for Medical Applications
1.35 MB
1/11/2021
PDF 1.35 MB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM Installation Instructions
524.05 KB
9/10/2020
PDF 524.05 KB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
488.55 KB
9/10/2020
PDF 488.55 KB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, �50 SCCM to �750 SCCM
82.4 KB
9/10/2020
PDF 82.4 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
282.8 KB
9/10/2020
PDF 282.8 KB
I2C Communications with Honeywell Digital Airflow Sensors Technical Note
237.91 KB
9/10/2020
PDF 237.91 KB
Solutions for Ventilators
2.79 MB
1/11/2021
PDF 2.79 MB
HM port style highres photo
99.62 KB
9/10/2020
99.62 KB
HT port style highres photo
67.61 KB
9/10/2020
67.61 KB
HH port style highres photo
110.38 KB
9/10/2020
110.38 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
714.43 KB
9/10/2020
PDF 714.43 KB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
319.61 KB
9/10/2020
319.61 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
474.08 KB
9/10/2020
PDF 474.08 KB
Energy and Environmental Design Trends
823.31 KB
1/11/2021
PDF 823.31 KB
Pressure or Airflow Sensors?
553.46 KB
1/11/2021
PDF 553.46 KB
Airflow, Force, and Pressure Sensors Range Guide
2.03 MB
1/11/2021
PDF 2.03 MB
Zephyr™ Digital HAF Series High Accuracy G 3/8 Threaded Female Fitting CAD Model.zip
357.53 KB
10/19/2020
357.53 KB
Zephyr™ Digital HAF Series High Accuracy Manifold Mount CAD Model.zip
288.48 KB
10/19/2020
288.48 KB
Zephyr™ Digital HAF Series High Accuracy 22 mm OD Tapered Male Fitting CAD Model.zip
150.07 KB
10/19/2020
150.07 KB
Sensors and Switches for Medical Applications
10.08 MB
10/14/2020
PDF 10.08 MB
Sensors and Switches for HVAC Applications
4.51 MB
1/11/2021
PDF 4.51 MB