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Amplified Airflow Sensors

AWM40000 Series

Compensated or uncompensated. ±25.0 SCCM, 1.0 SLPM, 6.0 SLPM. Analog output

Distributor Inventory

Operation

The microbridge mass airflow sensor operates on the theory of heat transfer. Mass airflow is directed across the surface of the sensing elements. Output voltage varies in proportion to the mass air or other gas flow through the inlet and outlet ports of the package. The specially designed housing precisely directs and controls the airflow across the microstructure sensing element. Mechanical design of the package allows it to be easily mounted to printed circuit boards.

The microbridge mass airflow sensor has a unique silicon chip based on advanced microstructure technology. It consists of a thin-film, thermally isolated bridge structure containing heater and temperature sensing elements. The bridge structure provides a sensitive and fast response to the flow of air or other gas over the chip. Dual sensing elements positioned on both sides of a central heating element indicate flow direction as well as flow rate. Laser trimmed thick film and thin film resistors provide consistent interchangeability from one device to the next.

The microbridge mass airflow sensor uses temperature sensitive resistors deposited within a thin film of silicon nitride. They are suspended in the form of two bridges over an etched cavity in the silicon. The chip is located in a precisely dimensioned airflow channel to provide a repeatable flow response. Highly effective thermal isolation for the heater and sensing resistors is attained by etching the cavity space beneath the flow sensor bridges. The small size and thermal isolation of the microbridge mass airflow sensor are responsible for the extremely fast response and high sensitivity to flows.

Dual Wheatstone bridges control airflow measurement – one provides closed loop heater control, the other contains the dual sensing elements. The heater circuit minimizes shift due to ambient temperature changes by providing an output proportional to mass flow. The circuit keeps the heater temperature at a constant differential (160 °C) above ambient air temperature which is sensed by a heat-sunk resistor on the chip. The ratiometric voltage output of the device corresponds to the differential voltage across the Wheatstone bridge circuit.

NOTICE

The effects of dust contamination, which may result form some applications, can be minimized. By design, dust particles that may be present in the air stream will flow past the chip parallel to the chip surface. In addition, the microstructure chip produces a thermophoretic effect, which repels micrometer sized dust particles away from the bridge structure.

A simple filter will prevent dust adherence to chip edges and channel surfaces. Adequate filtering in most applications can be achieved with a disposable five-micron filter used in series on the upstream side of the airflow device.

CAUTION: PRODUCT DAMAGE

AWM Series Microbridge Mass Airflow Sensors are not designed to sense liquid flow and will be damaged by liquid flow through the sensor.

Failure to comply with these instructions could result in product damage.

Others

  • Shock
    • 100 g peak (5 drops, 6 axes)
  • Operating Temperature
    • -40°C to 125°C [-40°F to 251°F]
  • Flow/Pressure Range
    • ±25 sccm
    • ±1000 sccm (1 SLPM)
  • Output Voltage at Trim Point
    • 8.5 mV dc ±1.5 mV dc at 25 sccm
    • 54.7 mV dc ±3.7 mV dc at 1000 sccm (1 SLPM)
  • Compensated Temperature
    • -25°C to 85°C [-13°F to 185°F]
  • Response Time
    • 1 ms typ., 3 ms max.
  • Port Style
    • Manifold
  • Common Mode Pressure
    • 150 psi
    • 25 psi
  • Null Offset
    • 0.0 mV dc ±1.0 mV dc
    • 0.0 mV dc ±1.5 mV dc
  • Weight
    • 14 g
    • 11 g
  • UNSPSC Commodity
    • 41111931 Flow Sensors
  • Repeatability
    • ±0.35 % Reading
    • ±0.50 % Reading
  • Media Compatibility
    • Hydrogen gas
    • Dry gas only
  • Signal Conditioning
    • Unamplified (mV)
  • Supply Voltage
    • 8.0 Vdc min., 10.0 Vdc typ., 15.0 Vdc max.
  • Series Name
    • AWM40000
  • Power Consumption
    • 60 mW max.
    • 75 mW max.
  • Null Shift over Temperature
    • ±0.20 mV dc
  • UNSPSC Code
    • 41111931
  • Output Shift over Temperature
    • ±2.5 % Reading
    • ±6 % Reading
  • Storage Temperature
    • -40°C to 125°C [-40°F to 251°F]

Others

  • Shock
    • 100 g peak (5 drops, 6 axes)
  • Operating Temperature
    • -40°C to 125°C [-40°F to 251°F]
  • Flow/Pressure Range
    • ±25 sccm
    • ±1000 sccm (1 SLPM)
  • Output Voltage at Trim Point
    • 8.5 mV dc ±1.5 mV dc at 25 sccm
    • 54.7 mV dc ±3.7 mV dc at 1000 sccm (1 SLPM)
  • Compensated Temperature
    • -25°C to 85°C [-13°F to 185°F]
  • Response Time
    • 1 ms typ., 3 ms max.
  • Port Style
    • Manifold
  • Common Mode Pressure
    • 150 psi
    • 25 psi
  • Null Offset
    • 0.0 mV dc ±1.0 mV dc
    • 0.0 mV dc ±1.5 mV dc
  • Weight
    • 14 g
    • 11 g
  • UNSPSC Commodity
    • 41111931 Flow Sensors
  • Repeatability
    • ±0.35 % Reading
    • ±0.50 % Reading
  • Media Compatibility
    • Hydrogen gas
    • Dry gas only
  • Signal Conditioning
    • Unamplified (mV)
  • Supply Voltage
    • 8.0 Vdc min., 10.0 Vdc typ., 15.0 Vdc max.
  • Series Name
    • AWM40000
  • Power Consumption
    • 60 mW max.
    • 75 mW max.
  • Null Shift over Temperature
    • ±0.20 mV dc
  • UNSPSC Code
    • 41111931
  • Output Shift over Temperature
    • ±2.5 % Reading
    • ±6 % Reading
  • Storage Temperature
    • -40°C to 125°C [-40°F to 251°F]
  • Shock : 100 g peak (5 drops, 6 axes)
  • Operating Temperature : -40°C to 125°C [-40°F to 251°F]
  • Flow/Pressure Range : ±25 sccm|±1000 sccm (1 SLPM)
  • Output Voltage at Trim Point : 8.5 mV dc ±1.5 mV dc at 25 sccm|54.7 mV dc ±3.7 mV dc at 1000 sccm (1 SLPM)
  • Compensated Temperature : -25°C to 85°C [-13°F to 185°F]
  • Response Time : 1 ms typ., 3 ms max.
  • Port Style : Manifold
  • Common Mode Pressure : 150 psi|25 psi
  • Null Offset : 0.0 mV dc ±1.0 mV dc|0.0 mV dc ±1.5 mV dc
  • Weight : 14 g|11 g
  • UNSPSC Commodity : 41111931 Flow Sensors
  • Repeatability : ±0.35 % Reading|±0.50 % Reading
  • Media Compatibility : Hydrogen gas|Dry gas only
  • Signal Conditioning : Unamplified (mV)
  • Supply Voltage : 8.0 Vdc min., 10.0 Vdc typ., 15.0 Vdc max.
  • Series Name : AWM40000
  • Power Consumption : 60 mW max.|75 mW max.
  • Null Shift over Temperature : ±0.20 mV dc
  • UNSPSC Code : 41111931
  • Output Shift over Temperature : ±2.5 % Reading|±6 % Reading
  • Storage Temperature : -40°C to 125°C [-40°F to 251°F]
Data Sheet
Name
Description
File Size
Date
Size
AWM40000 Series Airflow Sensors, Unamplified and Amplified
508.98 KB
10/14/2020
PDF 508.98 KB
Manuals and Guides
Name
Description
File Size
Date
Size
AWM40000 Series Microbridge Mass Gas-flow Sensors
194.4 KB
9/10/2020
PDF 194.4 KB
CAD Model
Name
Description
File Size
Date
Size
AWM40000 Series AWM42150VH CAD Model.zip
89.71 KB
12/3/2020
89.71 KB
AWM40000 Series AWM43300V CAD Model.zip
92.88 KB
12/3/2020
92.88 KB
Brochure
Name
Description
File Size
Date
Size
Airflow, Force, and Pressure Sensors Range Guide
2.03 MB
1/11/2021
PDF 2.03 MB
Sensors and Switches for Medical Applications
10.08 MB
12/3/2020
PDF 10.08 MB
Technical Note
Name
Description
File Size
Date
Size
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
9/10/2020
PDF 192.45 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
9/10/2020
PDF 100.21 KB
Airflow Sensor Glossary of Terms
156.26 KB
9/10/2020
PDF 156.26 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
9/10/2020
PDF 86.49 KB
Gas Media Compatibility & Correction Factors
97.66 KB
9/10/2020
PDF 97.66 KB
Energy and Environmental Design Trends
823.31 KB
1/11/2021
PDF 823.31 KB
Pressure or Airflow Sensors?
553.46 KB
1/11/2021
PDF 553.46 KB
Catalog
Name
Description
File Size
Date
Size
AWM Series Airflow Sensors Introduction
188.31 KB
9/10/2020
PDF 188.31 KB
Application Note
Name
Description
File Size
Date
Size
Sensors and Switches: Solutions for Medical Applications
1.35 MB
1/11/2021
PDF 1.35 MB
Solutions for Ventilators
2.79 MB
1/11/2021
PDF 2.79 MB
Name
Description
File Size
Date
Size
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
9/10/2020
PDF 192.45 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
9/10/2020
PDF 100.21 KB
AWM40000 Series Microbridge Mass Gas-flow Sensors
194.4 KB
9/10/2020
PDF 194.4 KB
AWM Series Airflow Sensors Introduction
188.31 KB
9/10/2020
PDF 188.31 KB
Airflow Sensor Glossary of Terms
156.26 KB
9/10/2020
PDF 156.26 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
9/10/2020
PDF 86.49 KB
Gas Media Compatibility & Correction Factors
97.66 KB
9/10/2020
PDF 97.66 KB
Sensors and Switches: Solutions for Medical Applications
1.35 MB
1/11/2021
PDF 1.35 MB
Solutions for Ventilators
2.79 MB
1/11/2021
PDF 2.79 MB
Energy and Environmental Design Trends
823.31 KB
1/11/2021
PDF 823.31 KB
Airflow, Force, and Pressure Sensors Range Guide
2.03 MB
1/11/2021
PDF 2.03 MB
Pressure or Airflow Sensors?
553.46 KB
1/11/2021
PDF 553.46 KB
AWM40000 Series Airflow Sensors, Unamplified and Amplified
508.98 KB
10/14/2020
PDF 508.98 KB
AWM40000 Series AWM42150VH CAD Model.zip
89.71 KB
12/3/2020
89.71 KB
AWM40000 Series AWM43300V CAD Model.zip
92.88 KB
12/3/2020
92.88 KB
Sensors and Switches for Medical Applications
10.08 MB
12/3/2020
PDF 10.08 MB