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Amplified Airflow Sensors

HAF Series - High FLow

Compensated. ±50 SCCM to ±750 SCCM - Analog or digital output. 10 SLPM to 300 SLPM - Digital output

Distributor Inventory

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow.

Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases.

10 SLPM to 300 SLPM

Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

±50 SCCM to ±750 SCCM

Standard flow ranges are available at ±50, ±100, ±200, ±400 or ±750 SCCM. Custom flow ranges are also available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series is compensated over the temperature range of 0 °C to 50 °C [32 °F to 122 °F] and operates across a temperature range of -20 °C to 70 °C [-4 °F to 158 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.

Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

Others

  • Operating Temperature
    • -20°C to 70°C [-4°F to 158°F]
  • Flow/Pressure Range
    • 0 SCCM to 50 SCCM
    • 0 SCCM to 200 SCCM
    • 0 SCCM to 750 SCCM
  • Compensated Temperature
    • 0°C to 50°C [32°F to 122°F]
  • Response Time
    • 1 ms typ.
  • Port Style
    • Long
    • Short
  • Common Mode Pressure
    • 25 psi max.
  • UNSPSC Commodity
    • 41111931 Flow Sensors
  • Media Compatibility
    • Dry gas only
  • Signal Conditioning
    • Amplified
  • Supply Voltage
    • 3.3 Vdc
    • 5.0 Vdc
  • Series Name
    • HAF
  • Power Consumption
    • 40 mW max.
    • 65 mW max.
  • UNSPSC Code
    • 41111931
  • Storage Temperature
    • -40°C to 125°C [-40°F to 251°F]

Others

  • Operating Temperature
    • -20°C to 70°C [-4°F to 158°F]
  • Flow/Pressure Range
    • 0 SCCM to 50 SCCM
    • 0 SCCM to 200 SCCM
    • 0 SCCM to 750 SCCM
  • Compensated Temperature
    • 0°C to 50°C [32°F to 122°F]
  • Response Time
    • 1 ms typ.
  • Port Style
    • Long
    • Short
  • Common Mode Pressure
    • 25 psi max.
  • UNSPSC Commodity
    • 41111931 Flow Sensors
  • Media Compatibility
    • Dry gas only
  • Signal Conditioning
    • Amplified
  • Supply Voltage
    • 3.3 Vdc
    • 5.0 Vdc
  • Series Name
    • HAF
  • Power Consumption
    • 40 mW max.
    • 65 mW max.
  • UNSPSC Code
    • 41111931
  • Storage Temperature
    • -40°C to 125°C [-40°F to 251°F]
  • Operating Temperature : -20°C to 70°C [-4°F to 158°F]
  • Flow/Pressure Range : 0 SCCM to 50 SCCM|0 SCCM to 200 SCCM|0 SCCM to 750 SCCM
  • Compensated Temperature : 0°C to 50°C [32°F to 122°F]
  • Response Time : 1 ms typ.
  • Port Style : Long|Short
  • Common Mode Pressure : 25 psi max.
  • UNSPSC Commodity : 41111931 Flow Sensors
  • Media Compatibility : Dry gas only
  • Signal Conditioning : Amplified
  • Supply Voltage : 3.3 Vdc|5.0 Vdc
  • Series Name : HAF
  • Power Consumption : 40 mW max.|65 mW max.
  • UNSPSC Code : 41111931
  • Storage Temperature : -40°C to 125°C [-40°F to 251°F]
Manuals and Guides
Name
Description
File Size
Date
Size
Airflow, Force, and Pressure Sensors Range Guide
2.03 MB
1/11/2021
PDF 2.03 MB
Installation Instructions
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM Installation Instructions
524.05 KB
12/3/2020
PDF 524.05 KB
CAD Model
Name
Description
File Size
Date
Size
HAF Series - High Flow CAD Models - grouped
796.24 KB
4/21/2021
796.24 KB
Brochure
Name
Description
File Size
Date
Size
Sensors and Switches for Medical Applications
10.08 MB
12/3/2020
PDF 10.08 MB
Technical Note
Name
Description
File Size
Date
Size
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
12/3/2020
PDF 86.49 KB
Airflow Sensor Glossary of Terms
156.26 KB
12/3/2020
PDF 156.26 KB
Gas Media Compatibility & Correction Factors
97.66 KB
12/3/2020
PDF 97.66 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
12/3/2020
PDF 100.21 KB
Energy and Environmental Design Trends
823.31 KB
1/11/2021
PDF 823.31 KB
Pressure or Airflow Sensors?
553.46 KB
1/11/2021
PDF 553.46 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
12/3/2020
PDF 192.45 KB
Catalog
Name
Description
File Size
Date
Size
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM
82.4 KB
12/3/2020
PDF 82.4 KB
Application Note
Name
Description
File Size
Date
Size
Sensors in Sleep Apnea Machines
1.88 MB
1/11/2021
PDF 1.88 MB
Sensors and Switches: Solutions for Medical Applications
1.35 MB
1/11/2021
PDF 1.35 MB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
488.55 KB
12/3/2020
PDF 488.55 KB
Solutions for Ventilators
2.79 MB
1/11/2021
PDF 2.79 MB
Sensors in Anesthesia Machines
2.3 MB
12/3/2020
PDF 2.3 MB
Sensors and Switches for HVAC Applications
4.51 MB
1/11/2021
PDF 4.51 MB
Product Photo
Name
Description
File Size
Date
Size
HAF Series - High Flow Product Photo - grouped
600.51 KB
4/21/2021
600.51 KB
Name
Description
File Size
Date
Size
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
86.49 KB
12/3/2020
PDF 86.49 KB
Airflow Sensor Glossary of Terms
156.26 KB
12/3/2020
PDF 156.26 KB
Gas Media Compatibility & Correction Factors
97.66 KB
12/3/2020
PDF 97.66 KB
Sensors in Sleep Apnea Machines
1.88 MB
1/11/2021
PDF 1.88 MB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
100.21 KB
12/3/2020
PDF 100.21 KB
Sensors and Switches: Solutions for Medical Applications
1.35 MB
1/11/2021
PDF 1.35 MB
Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM
82.4 KB
12/3/2020
PDF 82.4 KB
Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
488.55 KB
12/3/2020
PDF 488.55 KB
Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM Installation Instructions
524.05 KB
12/3/2020
PDF 524.05 KB
Solutions for Ventilators
2.79 MB
1/11/2021
PDF 2.79 MB
Energy and Environmental Design Trends
823.31 KB
1/11/2021
PDF 823.31 KB
Airflow, Force, and Pressure Sensors Range Guide
2.03 MB
1/11/2021
PDF 2.03 MB
Pressure or Airflow Sensors?
553.46 KB
1/11/2021
PDF 553.46 KB
Sensors and Switches for Medical Applications
10.08 MB
12/3/2020
PDF 10.08 MB
Sensors in Anesthesia Machines
2.3 MB
12/3/2020
PDF 2.3 MB
Sensors and Switches for HVAC Applications
4.51 MB
1/11/2021
PDF 4.51 MB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
192.45 KB
12/3/2020
PDF 192.45 KB
HAF Series - High Flow CAD Models - grouped
796.24 KB
4/21/2021
796.24 KB
HAF Series - High Flow Product Photo - grouped
600.51 KB
4/21/2021
600.51 KB