High Tech & Semiconductor
Vertex™ M Multi-Point Toxic Gas Monitoring System
8-24 point Chemcassette based multipoint gas detection system
The Vertex system can accept sampling points up to 400 feet (120 meters) from the central unit. Vertex M can also accept a mix of universal analyzer modules and pyrolyzer analyzers. The system monitors a wide variety of gases present in semiconductor fabrication with sensitivity as low as parts per billion (ppb).
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